一、課程說明(Course Description)
<br>
<br> Instructors: Faculty from Institute of NEMS
<br> 
<br>This is an introductory class to micro- and nano-scale science and technology in various fields including micromechanics, heat transfer, microfluidics, electromagnetics, micro-optics, chemical and life sciences etc..  Lectures will be organized as the Science, Technology and Applications of miniaturization, and given by MEMS faculties with their selected specialties or interests.  Class will be offered in the 1st semester primarily aiming at  1st year graduate students in MEMS-related area .  Topics to be covered include the following:
<br>
<br>Science of Miniaturization
<br>1. Microsystem scaling
<br>2. Modeling of micro heat flow
<br>3. Micro & nano chemical analysis
<br>4. Microsystem Sensing and Control
<br>5. Physics of nanoscale Materials
<br>
<br>Technology of Miniaturization
<br>6. CMOS MEMS
<br>7. MEMS Technology & MEMS packaging
<br>8. Techniques of nano pattern forming
<br>9. LIGA process
<br>
<br>Applications of Miniaturization
<br>10. Applications of RF MEMS
<br>11. Applications of MEMS in biomedical molecular diagnosis
<br>12. Applications of Micro/Nano fluidic systems in Biomedicine
<br>13. MEMS applications in nanotechnology
<br>14. Applications of Optical MEMS
<br>
<br>
<br> 二、指定用書(Text Books)
<br>
<br>Class notes.
<br>
<br>
<br> 三、參考書籍(References)
<br>
<br>1. Modeling MEMS and NEMS
<br>Author: John A. Pelesko, David H. Bernstein
<br>2. Microsystem Design
<br>Author: Stephen D. Senturia
<br>3. RF MEMS: Theory, Design, and Technology  
<br>Author: Gabriel M. Rebeiz
<br>4. Micromachined Transducers Sourcebood
<br>Author: Gregory T.A. Kovacs
<br>5. MEMS & Microsystems. Design and Manufacture
<br>Author: Tai-Ran Hsu
<br>6. 微機電系統技術與應用
<br>Author: 精儀中心
<br>
<br>References available at library reserved book section and in Institute of MEMS Library.
<br>
<br>
<br> 四、教學方式(Teaching Method)
<br>
<br>Lectures and research reports.
<br>
<br>
<br> 五、教學進度(Syllabus)
<br>
<br>
<br> 六、成績考核(Evaluation)
<br>
<br>Scoring:
<br>
<br>Homework: 50%
<br>Midterm Examination: 25%
<br>Final Examination: 25%
<br>
<br>
<br>A probem set will be given at the end of each lecture due at the begining of the next lecture.  Midterm and final examination will base on these problem sets.
<br>
<br>
<br> 七、可連結之網頁位址
<br>
<br>Handouts will be given at each lecture.
<br>
<br>
<br>
<br>
<br>
<br>
<br>
<br>
<br>
<br>