PME5230 Sensing and Actuation in Miniaturized Systems (Spring 2008)
<br>(This course will be given in English for this semester.  Class presentation will be also requested in English)
<br>本學期採英語授課（上課及期中/期末報告 以英語進行）
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<br>一、課程說明(Course Description)
<br>PME5230-Sensing and Actuation in Miniaturized Systems (微奈米系統之感測與致動)
<br>3 Units (3 學分)
<br>Instructor: Cheng-Hsien Liu (授課老師: 劉承賢)
<br>http://mx.nthu.edu.tw/~chhsliu/transducer_new/PME5230_Liu.html
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<br>Course Objectives:(In English)
<br>The Goal of the course is to provide senior and graduate students with the basic concepts and principles of sensing and actuation in miniaturized systems, which mostly use integrated circuit fabrication for their realization.  Categories of sensors and actuators include biological, chemical, mechanical, etc.  Basic mechanism of transduction, micro/nanofabrication techniques, and relative merits of the different technologies will be addressed.  This course will be research oriented and focuses on paper survey.  
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<br> 二、指定用書(Text Books)
<br>Textbook/ Required Class material: 
<br>My class notes (either handouts or on web downloadable files) 
<br>Proceedings of Transducers 07 
<br>Proceedings of MicroTAS 2007 
<br>Proceedings of IEEE MEMS 2008 
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<br> 三、參考書籍(References)
<br>Recommended References: 
<br>Gregory Kovacs, "Micromachined Transducers Sourcebook," McGraw-Hill, 1998 (highly recommended) 
<br>“Microsystems Design” by Stephen Senturia (ISBN 0-7923-7246-8) 
<br>Fundamentals of BioMEMS and Medical Microdevices” by Steven Saliterman (ISBN 0-8194-5977-1)
<br>AIP Handbook of Modern Sensors by Jacob Fraden
<br>Semiconductor sensors by M. Sze, 1994
<br>Mac Madau, " Fundamnetals of Microfabrication" CRC press 1998.
<br>And quite a few other MEMS related books, journal papers, conference proceeding 
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<br> 四、教學方式(Teaching Method)
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<br> 五、教學進度(Syllabus)
<br>Topics	Lecture Schedule
<br>Course Overview and Exploring Sensing and Actuation in Miniaturized Systems/Scaling	
<br>Introduction to Micro/Nano Transducers and Microsystem Technology and MEMS History (Idea Exploring Competition)	
<br>Micro/Nano Fabrication Techniques (I)	
<br>Micro/Nano Fabrication Techniques (II)	
<br>Class Presentations and Discussions (I)	
<br>Class Presentations and Discussions (II)	
<br>Miniaturized Mechanical Transducers and Microsystem Applications (I)	
<br>Miniaturized Mechanical Transducers and Microsystem Applications (II)	
<br>Class Presentations and Discussions (III)	
<br>Class Presentations and Discussions (IV)	
<br>Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (I)	
<br>Microfluidic Systems, BioMEMS and MEMS related NanoBio Tech. (II)	
<br>Idea Exploring Competition (Final Project)	
<br>Class Final Presentations (V)	
<br>Class Final Presentations  (VI)	
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<br> 六、成績考核(Evaluation)
<br>Class Presentation and Discussion including Class attendance:  55% 
<br>  Idea Exploring Competition: 15%
<br>Class Final Oral Presentations : 30% 
<br>Extra 5% is reserved for your class discussion and performance 
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<br> 七、可連結之網頁位址
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<br>http://mx.nthu.edu.tw/~chhsliu/transducer_new/PME5230_Liu.html
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