一、課程說明(Course Description)
<br>The promise of better performance, lower cost, and miniaturization of sensor
<br>and actuator systems has motivated growth in the area of
<br>MicroElectroMechanical Systems (MEMS). MEMS technology has broad applications
<br>such as inertial navigation, data storage, micromanipulation, optical
<br>communication, biochemical analysis, and microfluidic systems. In addition to
<br>the basic MEMS contents on microfabrication, micromechanical/biochemical
<br>sensors and actuation mechanisms, this course will cover advanced design
<br>topics at different levels, such as MEMS control and MEMS system-level design methodology.  
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<br> 二、指定用書(Text Books)
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<br>None. 
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<br> 三、參考書籍(References)
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<br>(1).Gregory T.A. Kovacs, Micromachined transducers sourcebook, The McGraw-Hill, Inc., 1998.
<br>(2).Stephen D. Senturia, Microsystem design, Kluwer Academic Publishers, 2001.
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<br> 四、教學方式(Teaching Method)
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<br>Powerpoint presentation and blackboard
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<br> 五、教學進度(Syllabus)
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<br>(1) Introduction
<br>(2) Microfabrication
<br>(3) Integrated Processes
<br>(4) Micromachanical Sensors
<br>(5) Bio- and Chemical Sensors
<br>(6) Electrostatic Actuation
<br>(7) Mechanics of Material
<br>(8) CMOS sensing interface
<br>(9) Mechanical Vibration
<br>(10) Sensor Noises
<br>(11) MEMS Control
<br>(12) Computer-Aided Design for MEMS
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<br> 六、成績考核(Evaluation)
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<br>Homework + Paper study + Lab (20%)
<br>Final exam (40%)
<br>Project (40%)
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<br> 七、可連結之網頁位址
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<br>http://www.ee.nthu.edu.tw/sclu/ene5400.htm
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