一、課程說明(Course Description)
<br>The promise of better performance, lower cost, and miniaturization of sensor
<br>and actuator systems has motivated growth in the area of
<br>MicroElectroMechanical Systems (MEMS). MEMS technology has broad applications
<br>such as inertial navigation, data storage, micromanipulation, optical
<br>communication, biochemical analysis, and microfluidic systems. In addition to
<br>the basic MEMS contents on microfabrication, micromechanical/biochemical
<br>sensors and actuation mechanisms, this course will cover advanced design
<br>topics at different levels, such as MEMS control and MEMS system-level design methodology.  
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<br> 二、指定用書(Text Books)
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<br>None. 
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<br> 三、參考書籍(References)
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<br>(1)**.Gregory T.A. Kovacs, Micromachined transducers sourcebook, The McGraw-Hill, Inc., 1998.
<br>(2).Stephen D. Senturia, Microsystem design, Kluwer Academic Publishers, 2001.
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<br> 四、教學方式(Teaching Method)
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<br>Powerpoint presentation and blackboard
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<br> 五、教學進度(Syllabus)
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<br>(1) Introduction
<br>(2) Microfabrication
<br>(3) Integrated Processes
<br>(4) Sensing circuits
<br>(5) Micromachanical Sensors
<br>(6) Bio- and Chemical Sensors
<br>(7) Electrostatic Actuation
<br>(8) Mechanics of Material
<br>(9) Mechanical Vibration
<br>(10) Sensor Noises
<br>(11) MEMS Control
<br>(12) Computer-Aided Design for MEMS
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<br> 六、成績考核(Evaluation)
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<br>Homework + Paper study + Lab (20%)
<br>Final exam (35%)
<br>Project I: accelerometers (20%)
<br>Project II: (25%)
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<br>Students choose a research topic to work on as the final project. First, you should clearly understand why you select the topic (motivation!). Then you are expected to do an extensive literature survey and realize the design, modeling, fabrication, performance, and important characteristics of related work in the field. Although you do not do the real design in this class, questions about design will definitely be asked in your final presentation for evaluation of your performance.
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<br>報告撰寫： 各位撰寫報告時可以參考期刊/研討會論文、網路上資料或他人的碩博士論文，請註明出處即可，以整段或顯著地copy and paste他人文章則是不允許的，你必須研讀後以自己的方式寫出自己的報告。
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<br> 七、可連結之網頁位址
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<br>http://www.ee.nthu.edu.tw/sclu/ene5400.htm
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