一、課程說明(Course Description)
<br>The course will teach all technology for microsystem and nanoengineering, including microfabriation, 
<br>sensing technique, and MEMS packaging. The applications for MEMS, Optical MEMS, RF MEMS, and 
<br>BioMEMS, will be introduced. The future hot research topics for nanotechnology will also be shown.
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<br>二、指定用書(Text Books)
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<br>1.Course handout 
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<br>三、參考書籍(References)
<br>1.	“Foundations of MEMS”, Chang Liu, Pearson Education, Inc. 2006. 
<br>2.	“MEMS and Microsystems: design , manufacture, and nanoscale engineering,” 2nd Edition, by Tai-
<br>Ran Hsu, John Wiley & Sons, Inc., Hoboken, New Jersey, 2008
<br>3.	"Fundamnetals of Microfabrication", Marc Madou, 2nd edition, CRC press, 2001.
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<br>四、教學方式(Teaching Method)
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<br>Lectures and research reports.
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<br>五、教學進度(Syllabus)
<br>1.	Introduction (Ch1) HW1	(09/21) Yao
<br>2.	Scaling Effect	(09/28) Yao
<br>3.	Introduction to Microfabrication (Ch2, Video) HW2	(10/05) Yao
<br>4.	Bulk Micromachining (Ch10) HW3	(10/12) Li
<br>5.	Surface Micromachining (Ch11) 	(10/19) Li
<br>6.	Sensors and Actuators (CH4-9) HW5	(10/26) Li
<br>7.	Polymer MEMS HW4	(11/02) Yao
<br>8.	CMOS MEMS and RF MEMS	(11/09) Li
<br>9.	Optical MEMS (Ch 15)	(11/16) Li
<br>10.	BioMEMS	(11/23) Yao
<br>Midterm                      	(11/30) 
<br>11.	Introduction to Nanotechnologies	(12/07) Wang
<br>12.	Nano-Electronics	(12/14) Wang
<br>13.	Nano-OptoElectronics	(12/21) Wang
<br>14.	Nano-Mechanics, Nano-motors, and Nano-energy	(12/28) Wang
<br>15.	Bionanotechnology	(01/04) Wang
<br>Final Presentation     	(01/11) 
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<br>六、成績考核(Evaluation)
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<br>Homework 30% (no late), Midterm30%, Final report 40%(Oral/Written 20% each)
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