一、課程說明(Course Description)
<br>The purpose of this course is to introduce students the fundamentals of plasma laboratory techniques including plasma sourses and plasma diagnostic techniques, as well as general experimental design methods.   
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<br>The lecture will be given in English first and then a brief
<br>explanation in Chinese.
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<br> 二、指定用書(Text Books)
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<br>lecture notes
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<br> 三、參考書籍(References)
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<br>References:
<br>1. A. Wang, Introduction to Experimental Plasma Physics
<br>2. Varian Associates, Basic Vacuum Practice
<br>3. J. R. Roth, Industrial Plasma Engineering
<br>4. M. Libermann and A. Lichtenberg, Principles of Plasma Discharges and 
<br>   Materials Processing
<br>5. O. Auciello and D. Flamm, Plasma Diagnostics
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<br> 四、教學方式(Teaching Method)
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<br>lectures 50 %
<br>experiments (demostration by senior graduate students) 50 %
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<br> 五、教學進度(Syllabus)
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<br> A. Vacuum system: 
<br>    Vacuum pumps and gauges.
<br>    High vacuum systems: Diffusion pump system & Turbo-molecular pump system.  
<br> B. Plasma Sources
<br>    1. Inductively-coupled plasmas (ICP)
<br>    2. Electron Cyclotron Resonance (ECR) Microwave Plasmas
<br>    3. DC Plasmas*
<br> C. Plasma Diagnostics
<br>    1. Langmuir Probe
<br>    2. Microwave Interferometer
<br>    3. Spectroscopy of Plasma Induced Optical Emissions
<br>    4. Computer Data Acquisition and Control
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<br> D. Experiment Design Methods
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<br> 六、成績考核(Evaluation)
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<br>    Experiment reports: 60 %
<br>    Final exam. : 40 %
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<br> 七、可連結之網頁位址
<br>    NTHU E-learning (清華大學遠距教學系統)
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