一、課程說明(Course Description) 
<br>The silicon integrated circuit is surely one of the wonders of our age. The 
<br>ability to fabricate tens of millions of individual components on a chip with an 
<br>area of a few centimeter square has enabled the information age. This course 
<br>attempts to describe not only the manufacturing practice associated with the 
<br>technologies used in silicon chip fabrication, but also the underlying scientific 
<br>basis for those technologies. 
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<br>二、指定用書(Text Books) 
<br>1. J. D. Plummer, M. M. Deal, and P. B. Griffin, Silicon VLSI Technology, Prentice 
<br>Hall, 2000. 
<br>2. Michael Quirk and Julian Serda, Semiconductor Manufacturing Technology, Prentice 
<br>Hall, 2001. 
<br>3. Robert Doering and Yoshio Nishi, Handbook of Semiconductor Manufacturing Technology, 
<br>CRC Press 2008. 
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<br>三、參考書籍(References) 
<br>To be announced 
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<br>四、教學方式(Teaching Method) 
<br>1. In Chinese 
<br>2. power point slides will be uploaded in the e-learning system one week before we 
<br>start the chapter. 
<br>3. We may invite few speakers from industry to give a more comprehensive and 
<br>advanced view on some special issues discussed in our lecture. 
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<br>五、教學進度(Syllabus) 
<br>1. Introduction	
<br>2. Modern Electronic Device Technology 
<br>3. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers 
<br>4. Semiconductor Manufacturing 
<br>5. Lithography 
<br>6. Thermal Oxidation 
<br>7. Diffusion 
<br>8. Ion Implantation 
<br>9. Thin Film Deposition 
<br>10. Etching 
<br>11. Back-end technology 
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<br>六、成績考核(Evaluation) 
<br>1 Midterms (25% for each) 
<br>2 Final (30%) 
<br>3 Homework (20%) 
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