課程內容請依下列項目輸入：
<br>一、課程說明(Course Description)
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<br>We will first review the fundamental principles of plasma discharges for industrial applications such as material processing and/or plasma lightings/displays, and then discuss special topics such as plasma etch, atmospheric pressure plasmas, etc.  Plasma discharge modeling using fluid model will be also introduced.  
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<br>二、指定用書(Text Books)
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<br>M. Liberman and A. Lichtenberg, Principles of Plasma Discharges and  
<br>    Materials Processing, 2nd ed., 2005.
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<br>三、參考書籍(References)
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<br>1. Alexander Fridman and Lawrence A. Kennedy, Plasma Physics and   
<br>     Engineering, 2004. 
<br>2. Yu P. Raizer, Gas Discharge Physics, 1997.
<br>3. Recent journal articles from JVSTA, Physis of Plasmas, Applied Physics   
<br>   Letters, PSST, etc. 
<br>4. Brian Chapman, Glow Discharge Processes, 1980.
<br>5. F.F. Chen, Introduction to Plasma Physics and Controlled Fusion, 1984. 
<br>6. J. R. Roth, Industrial Plasma Engineering, 1996.
<br>7. Oleg A. Popov, High Density Plasma Sources, 1995.
<br>8. Afred Grill, Cold Plasma in Materials Fabrication, 1994.
<br>9. O. Auciello and D. Flamm, Plasma Diagnostics, 1989
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<br>四、教學方式(Teaching Method)
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<br>lecture
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<br>五、教學進度(Syllabus)
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<br>1. Principles of low temperature plasmas
<br> Basic plasma equations and equilibrium (Chapter 2)
<br> Atomic & Molecular collisions (Chapter 3 & 8)  
<br> Plasma Dynamics (Chapter 4)
<br> Diffusion and Transport (Chapter 5)
<br> DC Sheaths (Chapter 6)
<br> Chemical reactions and equilibrium (Chapter 7 & 8.5)
<br> Chemical kinetics and surface processes (Chapter 9)
<br> Particle and energy balance in discharges (Chapter 10)
<br>2. Plasmas sources
<br> DC discharges (Chapter 13)
<br> RF capacitively coupled discharges (Chapter 11)
<br> Inductively coupled discharges (Chapter 12)
<br> Atmospheric plasma discharges
<br> Dielectric Barrier Discharges
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<br>六、成績考核(Evaluation)
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<br>Homework: 35 %  (6-7 assignments)
<br>Final Exam: 35 %  6/15 (Sun), 19:00 - 22:00
<br>Term paper/project study report / Simulation project : 30 %
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<br>七、可連結之網頁位址
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<br>iLMS system