一、課程說明(Course Description)
<br>
<br>This course teachs student to utilize known MEMS/MST 
<br>(Micro-Electro-Mechanical System/Mciro System Technology)knoweledge combined with
<br>MEMS CAD software to design real MEMS/MST device.  Two commercial available MEMS
<br>foundries (MOSIS/SCNA and MCNC/MUMPS) and simple physical model on accelerator and 
<br>combdrive actuator will be elaborated to demonstrate the design process.  Finally,
<br>The student will combine the knoweledge learned from the course to design and 
<br>present their own MEMS device.
<br>
<br>
<br> 二、指定用書(Text Books)
<br>
<br>1.	Micro System Design Class Notes, Fan-Gang Tseng, NTHU book store, or  
<br>http://oz.nthu.edu.tw/~d9511818/, 2015
<br>2.	CMOS 實體層設計-使用L-EDIT, Uyemura著, 楊忠煌譯, 高立出版社, 1998.
<br>3.	Microsystem Design, Stephen D. Senturia, Kluwer Academic Publishers, Boston, 2000.
<br>
<br>
<br>
<br> 三、參考書籍(References)
<br>
<br>1. Micromachines, a new era in mechanical engineering, Iwao Fujimasa, Oxford Science Publication, 
<br>1996.
<br>2.Micro Mechanics and MEMS, classic and seminar papers to 1990, William S. Trimmer, IEEE press, 
<br>1997.
<br>3.On Size and Life, T. A. McMahon and J. T. Bonner, Scientific American Library, 1983.
<br>4.Fundamentals of Microfabrication, Marc Madou, CRC Press, 1997. 
<br>5.Micromachined Transducers source book, Gregory T.A. Kovacs, McGraw Hill, 1998 
<br>6.Semiconductor Sensors, S.M. Sze, Wiley Inter. Science, 1994.
<br>
<br>
<br>
<br> 四、教學方式(Teaching Method)
<br>
<br>Lectures, CAD software hand on practice, presentations
<br>
<br>
<br> 五、教學進度(Syllabus)
<br>
<br>Tentative Outline for Micro System Design:
<br>1.	Scope of the Micro System Design, the current status of Micro System Technology  (9/14, 瑜萱, 劉鈞)
<br>2.	Brief Review of MEMS technology I - Scaling law (hw#1,)(9/21)
<br>3.	Brief Review of MEMS technology III- lithography and IC process (10/5, 瑜萱, 劉鈞)
<br>4.	Brief Review of MEMS technology II- Bulk micromachining (hw#2) (10/12)
<br>5.	Brief Review of MEMS technology IV- Surface micromachining, and others.(10/19)
<br>6.	Midterm#1 (10/26, Mon, 9:00-12:00 am,  瑜萱, 劉鈞)
<br>7.	Introduction and hand-on practice of MEMS design software-LEIDT (hw#3,) (11/2 team formation)
<br>8.	IC and MEMS foundry I.-MOSIS  (11/9)
<br>9.	Coventerware (11/16, Monday, 高速電腦中心, High Speed Computer Center)
<br>10.	Design example I: IC process and Micro accelerometer design using MOSIS process (hw#4) (11/23, 
<br>11/30)
<br>11.	Midterm #2 (12/7, Mon, 10:00-12:00 am, 瑜萱, 劉鈞)
<br>12.	IC and MEMS foundry II.-.Cronos (12/14)
<br>13.	Design example II: Micro comb-drive motor design using MUMPS process (hw#5)(12/21)
<br>14.	 Thermal actuator design (12/28)
<br>15.	Special topics on MEMS design (Micro Droplet generator, BioMEMS and Micro Fluidics)
<br>16.	Final presentation (1/4)
<br>Abroad: 9/14 (UK), 10/5(USA), 10/26(Korea), 11/16 (Hawaii), No class: 9/28(moon festival),
<br>Final report due: 1/11/2014 Monday
<br>
<br>
<br> 六、成績考核(Evaluation)
<br>
<br>Homework: 30%, Midterm: 30%, Presentations: 15%, final report: 25%
<br>
<br>
<br> 七、可連結之網頁位址
<br>
<br>fangang.web.nthu.edu.tw
<br>
<br>