一、Course Description
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<br>This course teachs student to utilize fundamental MEMS/MST (Micro-Electro-Mechanical 
<br>System/Mciro System Technology)knoweledge combined with MEMS CAD software to design real 
<br>MEMS/MST devices.  Two commercial available MEMS foundries (MOSIS/SCNA and MCNC/MUMPS) 
<br>and simple physical model on accelerator and combdrive actuator will be elaborated to demonstrate 
<br>the design process.  Finally, The student will combine the knoweledge learned from the course to 
<br>design and present their own MEMS device.  This course is offered in English.
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<br> 二、Text Books
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<br>1.	Micro System Design Class Notes, Fan-Gang Tseng,  please download them at 
<br>fangang.web.nthu.edu.tw.
<br>2.	CMOS layout design-using L-Edit, (CMOS 實體層設計-使用L-EDIT), by Uyemura, 楊忠煌譯, 高立出
<br>版社, 1998.
<br>3.	Microsystem Design, Stephen D. Senturia, Kluwer Academic Publishers, Boston, 2000.
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<br> 三、References
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<br>1. Micromachines, a new era in mechanical engineering, Iwao Fujimasa, Oxford Science Publication, 
<br>1996.
<br>2.Micro Mechanics and MEMS, classic and seminar papers to 1990, William S. Trimmer, IEEE press, 
<br>1997.
<br>3.On Size and Life, T. A. McMahon and J. T. Bonner, Scientific American Library, 1983.
<br>4.Fundamentals of Microfabrication, Marc Madou, CRC Press, 1997. 
<br>5.Micromachined Transducers source book, Gregory T.A. Kovacs, McGraw Hill, 1998 
<br>6.Semiconductor Sensors, S.M. Sze, Wiley Inter. Science, 1994.
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<br> 四、Teaching Method
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<br>Lectures, CAD software hand on practice, presentations
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<br> 五、Syllabus
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<br>Tentative Outline for Micro System Design:
<br>1.	Scope of the Micro System Design, the current status of Micro System Technology  
<br>2.	Brief Review of MEMS technology I - Scaling law (hw#1)
<br>3.	Brief Review of MEMS technology III- lithography and IC process
<br>4.	Brief Review of MEMS technology II- Bulk micromachining (hw#2) 
<br>5.	Brief Review of MEMS technology IV- Surface micromachining, and others.
<br>6.	Midterm#1 
<br>7.	Introduction and hand-on practice of MEMS design software-LEIDT (hw#3,) ( team formation)
<br>8.	IC and MEMS foundry I.-MOSIS 
<br>9.	Coventerware ( High Speed Computer Centre)
<br>10.	Design example I: IC process and Micro accelerometer design using MOSIS process (hw#4) 
<br>11.	Midterm #2
<br>12.	IC and MEMS foundry II.-.Cronos 
<br>13.	Design example II: Micro comb-drive motor design using MUMPS process (hw#5)
<br>14.	 Thermal actuator design
<br>15.	Special topics on MEMS design (Micro Droplet generator, BioMEMS and Micro Fluidics)
<br>16.	Final presentation 
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<br>Final report due: one week after the final presentation
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<br> 六、Evaluation
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<br>Homework: 30%, Midterm: 30%, Presentations: 15%, final report: 25%
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<br> 七、webpage
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<br>fangang.web.nthu.edu.tw
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