課程大綱Detailed Course Syllabus
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<br>● 課程說明(Course Desc<x>ription)
<br>微電子工程(ULSI Technology)課程
<br>The advances in ultra-large-scale-integration (ULSI) technology ba<x>sed on 
<br>aggressive scaling of CMOS devices provide enormous opportunities for high-
<br>performance communication, and computing systems. This course is designed to 
<br>provide the current status of advanced ULSI technology  process and CMOS 
<br>integration projecting a road map for nanoelectronic devices for the current and 
<br>next generation. 先修課程: 無
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<br>● 指定用書(Text Books)
<br>1.  2016 IEDM short course for 5nm technology node (350 pages).
<br>2. 教師自編的微電子工程(ULSI Technology 150 pages)
<br>(Handout of related ULSI Nanoelectronic devices SCI journal and conference 
<br>papers)
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<br>● 參考書籍(References)
<br>1. Hong Xiao(蕭宏) 原著「Introduction to Semiconductor Manufacturing Technology」
<br>(第二版)
<br>2. 2016 IEDM short course for 5nm technology node materials.
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<br>● 教學方式(Teaching Method)
<br>投影片教學 90%, 版書 10%
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<br>● 教學進度(Syllabus)
<br>Chapter1: ULSI Technology Unit process
<br>Chapter2: ULSI Technology process integration
<br>Chapter3: FinFET Technology process integration
<br>Chapter4: 2016 IEDM short course for 5nm technology node materials
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<br>● 成績考核(Evaluation)
<br>Open book Midtern1 40%,  Open book Midtern2 40%, Final report 20%  
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<br>● 可連結之網頁位址 相關網頁(Personal Website)
<br>No
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