課程內容請依下列項目輸入：
<br>一、課程說明(Course Desc<x>ription)
<br>
<br>We will first review the fundamental principles of plasma discharges for 
<br>industrial applications such as material processing, and then discuss special 
<br>topics such as plasma etch, atmospheric pressure plasmas, etc.  Plasma discharge 
<br>modeling using fluid model (CFE-ACE+) will be also introduced.  
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<br>二、指定用書(Text Books)
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<br>M. Liberman and A. Lichtenberg, Principles of Plasma Discharges and  
<br>    Materials Processing, 2nd ed., 2005.
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<br>三、參考書籍(References)
<br>
<br>
<br>1. Alexander Fridman and Lawrence A. Kennedy, Plasma Physics and   
<br>     Engineering, 2004. 
<br>2. Yu P. Raizer, Gas Discharge Physics, 1997.
<br>3. Recent journal articles from JVSTA, Physis of Plasmas, Applied Physics   
<br>   Letters, PSST, etc. 
<br>4. Brian Chapman, Glow Discharge Processes, 1980.
<br>5. F.F. Chen, Introduction to Plasma Physics and Controlled Fusion, 1984. 
<br>6. J. R. Roth, Industrial Plasma Engineering, 1996.
<br>7. Oleg A. Popov, High Density Plasma Sources, 1995.
<br>8. Afred Grill, Cold Plasma in Materials Fabrication, 1994.
<br>9. O. Auciello and D. Flamm, Plasma Diagnostics, 1989
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<br>四、教學方式(Teaching Method)
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<br>lecture
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<br>五、教學進度(Syllabus)
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<br>1. Principles of low temperature plasmas
<br> Basic plasma equations and equilibrium (Chapter 2)     Week 1
<br> Atomic & Molecular collisions (Chapter 3 & 8)          Week 2-3
<br>   CFD-ACE+ Simulation - Geometry & Mesh
<br> Plasma Dynamics (Chapter 4)                            Week  4
<br>   CFD-ACE+ Simulation - Materials and Boundary
<br> Diffusion and Transport (Chapter 5)                    Week  5   
<br> DC Sheaths (Chapter 6)                                 Week  6     
<br> Chemical reactions and equilibrium (Chapter 7 & 8.5)   Week  7
<br>    CFD-ACE+ Simulation - Gas Phase Reactions
<br> Chemical kinetics and surface processes (Chapter 9)    Week  8
<br> Particle and energy balance in discharges (Chapter 10) Week  9
<br>    CFD-ACE+ Simulation - Surface Reactions
<br>2. Plasmas sources
<br> DC discharges (Chapter 13)                             Week 10 - 11
<br>    CFD-ACE+ Simulation - Plasma Module and Chemistry Module
<br> RF capacitively coupled discharges (Chapter 11)        Week 12 - 13
<br>    CFD-ACE+ Simulation - Flow Module
<br> Inductively coupled discharges (Chapter 12)            Week 14
<br>    CFD-ACE+ Simulation
<br> Atmospheric plasma discharges                          Week 15
<br>    CFD-ACE+ Simulation
<br> Dielectric Barrier Discharges                          Week 16
<br>    CFD-ACE+ Simulation
<br> Student Project Presentation                           Week 17-18 
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<br>六、成績考核(Evaluation)
<br>
<br>Homework: 35 %  (6-7 assignments)
<br>Final Exam: 35 %  6/15 (Sun), 19:00 - 22:00
<br>Term paper/project study report / Simulation project : 30 %
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<br>七、可連結之網頁位址
<br>
<br>iLMS system