一、課程說明(Course Desc<x>ription)
<br>Chapter 1  Introduction 	       
<br>Chapter 2  Nuclear Energy Loss / Electronic Energy Loss 	
<br>Chapter 3  Range Distributions / Energy Deposition Distributions
<br>Chapter 4  Damage Distributions
<br>Chapter 5  Computer Simulation of Ion Implantation
<br>Chapter 6  Ion Implantation Machines
<br>Chapter 7  Rutherford Backscattering Spectrometry
<br>Chapter 8  Sputtering
<br>Chapter 9  Secondary Ion Mass Spectrometry
<br>Chapter 10 Ion Channeling Effects
<br>Chapter 11 Raman Scattering Spectrometry
<br>Chapter 12 Plasma Immersion Ion Implantation
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<br>二、先修背景(Prerequisites)：
<br>1. Elementary Physics
<br>2. Classical Mechanics
<br>3. Introduction to Materials Science
<br>4. Numerical Analysis
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<br>三、指定用書(Text Books)
<br>Handout will be distributed during the class.
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<br>四、參考書籍(References)
<br>1.  H. Ryssel and I. Ruge, "Ion Implantation," (John Wiley & Sons Ltd., 1986).
<br>2.  M. Nastasi, J.W. Mayer, and J.K. Hirvonen, "Ion-solid interactions: 
<br>    fundamentals and applications," Cambridge Solid State Science Series, 
<br>    Cambridge University Press 1996.
<br>3.  J.F. Ziegler, J.P. Biersack, and U. Littmark, "Stopping and Range of Ions
<br>    in Solids," vol. 1, (Pergamon Press, New York, 1985).
<br>4.  M.A. Kumakhov and F.F. Komarov, "Energy Loss and Ion Ranges in Solids," 
<br>    (Gordon and Breach Science Publishers, New York, 1 1979).
<br>5.  D. Stievenard and J.C. Bourgoin, "Ion Implantation in Semiconductors," 
<br>    (Trans Tech Publications Ltd., Switzerland, 1988).
<br>6.  H. Gnaserm, "Low-Energy Ion Irradiation of Solid Surfaces," (Springer-
<br>    Verlag Ltd., Berlin, 1999).
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<br>五、教學方式(Teaching Method)
<br>1. 投影片教學
<br>2. 專題演講
<br>3. 修課學生上台專題報告
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<br>六、教學進度(Syllabus)
<br>4. 每週三小時
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<br>七、成績考核(Evaluation)
<br>成績考核的內容包括：考試、作業、上台專題報告、以及專題讀書報告等四項，各所佔的比例不盡相同。
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<br>八、可連結之網頁位址 
<br>N/A
<br>