課程內容請依下列項目輸入：
<br>一、課程說明(Course Desc<x>ription)
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<br>This course is a continuing course of "Plasma Engineering and Application" and 
<br>will be given in a project study approach.   Students will conduct numerical 
<br>simulation of plasma discharges, e.g., capacitively coupled plasmas and 
<br>microwave plasmas.  
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<br>二、指定用書(Text Books)
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<br>M. Liberman and A. Lichtenberg, Principles of Plasma Discharges and  
<br>    Materials Processing, 2nd ed., 2005.
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<br>三、參考書籍(References)
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<br>1. Alexander Fridman and Lawrence A. Kennedy, Plasma Physics and   
<br>     Engineering, 2004. 
<br>2. Yu P. Raizer, Gas Discharge Physics, 1997.
<br>3. Recent journal articles from JVSTA, Physis of Plasmas, Applied Physics   
<br>   Letters, PSST, etc. 
<br>4. Brian Chapman, Glow Discharge Processes, 1980.
<br>5. F.F. Chen, Introduction to Plasma Physics and Controlled Fusion, 1984. 
<br>6. J. R. Roth, Industrial Plasma Engineering, 1996.
<br>7. Oleg A. Popov, High Density Plasma Sources, 1995.
<br>8. Afred Grill, Cold Plasma in Materials Fabrication, 1994.
<br>9. O. Auciello and D. Flamm, Plasma Diagnostics, 1989
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<br>四、教學方式(Teaching Method)
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<br>project study/computer simulation
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<br>五、教學進度(Syllabus)
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<br>六、成績考核(Evaluation)
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<br>project report ; 100 %
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<br>七、可連結之網頁位址
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<br>iLMS system
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<br>Office Hour: Wednesday 15:30-17:20
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