Background courses:
<br>Introduction to MEMS (MicroElectroMechanical Systems)
<br>Semiconductor Device Physics, IC Design or Fabrication 
<br>Engineering Mechanics, Mechanics of Materials, Fluid Mechanics
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<br>Grade: Homework: 30%, Midterm: 30%, Final exam.: 20%, Final presentation: 20%
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<br>TAs: 魏瑜萱 Yu-Hsuan Wei <u96187040@gmail.com>, 朱學瑤Hsueh-Yao Chu 
<br><kecokoyo@gmail.com>,
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<br>Tentative Outline for Micro System Design:
<br>Scope of the Micro System Design, the current status of Micro System Technology  
<br>(9/11, Tseng)
<br>Brief Review of MEMS technology I - Scaling law (hw#1)(9/18, Tseng)
<br>Brief Review of MEMS technology III- lithography and IC process (9/25, Tseng)
<br>Brief Review of MEMS technology II- Bulk micromachining (hw#2) (10/2, Tseng)
<br>Brief Review of MEMS technology IV- Surface micromachining, and others. (10/16, Yao)
<br>Introduction and hand-on practice of MEMS design software-LEIDT (hw#3) (10/23, 
<br>Wei, final project team formation)
<br>Midterm#1 (10/30, Mon, 9:00-12:00 am, Wei and Chu)
<br>IC and MEMS foundry I.-MOSIS  (11/6, Su)
<br>Coventerware (11/13, Monday, 高速電腦中心, High Speed Computer Center)
<br>Design example I: IC process and Micro accelerometer design using MOSIS process 
<br>(hw#4) (11/20, 11/27, Su)
<br>Midterm #2 (12/4, Mon, 10:00-12:00 am, Wei and Chu)
<br>IC and MEMS foundry II.- Cronos (12/11, Yao)
<br>Design example II: Micro comb-drive motor design using MUMPS process (hw#5)
<br>(12/18, Yao)
<br>Thermal actuator design (12/25, Su)
<br>Final Exam. (1/2 night, Wei and Chu)
<br>Final presentation (1/8, Tseng)
<br>Notice: 10/9 (National Holiday), 10/23 (MTas 2016), 1/1 (New year holiday)
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<br>Textbooks:
<br>1.	Micro System Design Class Notes, Fan-Gang Tseng, NTHU book store, or  
<br>http://oz.nthu.edu.tw/~d9511818/, 2016
<br>2.	CMOS Layout Design-Using L-EDIT, Uyemura, 楊忠煌譯, 高立出版社, 1998.
<br>3.	Microsystem Design, Stephen D. Senturia, Kluwer Academic Publishers, Boston, 
<br>2000.
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<br>References:
<br>Semiconductor Sensors, S.M. Sze, Wiley Inter. Science, 1994
<br>Micromachines, a new era in mechanical engineering, Iwao Fujimasa, Oxford Science 
<br>Publication, 1996.
<br>Micro Mechanics and MEMS, classic and seminar papers to 1990, William S. Trimmer, 
<br>IEEE press, 1997.
<br>On Size and Life, T. A. McMahon and J. T. Bonner, Scientific American Library, 1983.
<br>Fundamentals of Microfabrication, Marc Madou, CRC Press, 1997. 
<br>Micromachined Transducers source book, Gregory T.A. Kovacs, McGraw Hill, 1998 
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