一、課程說明(Course Desc<x>ription)
<br>The course will teach all technology for microsystem and nanoengineering, including microfabriation, 
<br>sensing technique, and fundamental of nanotechnology. The applications for MEMS, Optical MEMS, RF 
<br>MEMS, and BioMEMS, will be introduced. The future hot research topics for nanotechnology will also be 
<br>shown.
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<br>二、指定用書(Text Books)
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<br>1. Course handout 
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<br>三、參考書籍(References)
<br>1.	“Foundations of MEMS”, Chang Liu, Pearson Education, Inc. 2006. 
<br>2.	“MEMS and Microsystems: design , manufacture, and nanoscale engineering,” 2nd Edition, by 
<br>Tai-Ran Hsu, John Wiley & Sons, Inc., Hoboken, New Jersey, 2008
<br>3.	"Fundamnetals of Microfabrication", Marc Madou, 2nd edition, CRC press, 2001.
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<br>四、教學方式(Teaching Method)
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<br>Lectures and research reports.
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<br>五、教學進度(Syllabus)
<br>1.	Introduction (Ch1) HW1	
<br>2.	Scaling Effect	
<br>3.	Introduction to Microfabrication (Ch2, Video) HW2	
<br>4.	Bulk Micromachining (Ch10) HW3	
<br>5.	Surface Micromachining (Ch11)	
<br>6.	CMOS MEMS and Magnetic MEMS	
<br>7.	Polymer MEMS Fabrication HW4	
<br>8.	Sensors and Actuators (CH4-9) HW5	
<br>9.	Optical MEMS and BioMEMS (Ch 15)		
<br>Midterm	
<br>10.	Introduction to Nanotechnologies	
<br>11.	NanoElectronics	
<br>12.	Nano-OptoElectronics 
<br>13.	Nano-Mechanics, Nano-energy/Bionanotechnology
<br>Final Report 
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<br>六、成績考核(Evaluation)
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<br>Homework 30% (no late), Midterm35%, Term project 35%(Oral 15%/Written 10%/Contribution 10%)
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