一、課程說明(Course Desc<x>ription)
<br>The promise of better performance, lower cost and miniaturization of sensor
<br>and actuator systems has motivated growth in the area of
<br>MicroElectroMechanical Systems (MEMS). MEMS technology has been widely applied 
<br>in Internet of Things (IoT), with applications found in inertial navigation, 
<br>data storage, micromanipulation, optical communication, biochemical analysis, 
<br>and microfluidic systems. 
<br>
<br>In addition to the basic MEMS contents on microfabrication, 
<br>micromechanical/biochemical sensors and actuation mechanisms, this course will 
<br>cover advanced design topics such as low-noise sensor readout design, MEMS 
<br>control and MEMS system-level design methodology. 
<br>
<br>ba<x>sed on the syllabus and ob<x>jectives of this course, I expect students to end 
<br>the course with analytical skills in designing a mechanical sensors such as 
<br>capacitive accelerometers.
<br>
<br>二、指定用書(Text Books)
<br>
<br>None. 
<br>
<br>三、參考書籍(References)
<br>
<br>1. Gregory T.A. Kovacs, Micromachined transducers sourcebook, The McGraw-Hill, 
<br>Inc., 1998.
<br>
<br>2. Stephen D. Senturia, Microsystem design, Kluwer Academic Publishers, 2001.
<br>
<br>
<br>四、教學方式(Teaching Method)
<br>
<br>Powerpoint presentation and blackboard
<br>
<br>
<br>五、教學進度(Syllabus)
<br>
<br>(1) Introduction
<br>(2) Microfabrication
<br>(3) Integrated Processes
<br>(4) Sensing circuits (Chopper-stabilization, TIA and switched-capacitor 
<br>circuit, techniques for reducing sensor offset, noise and charge injection)
<br>(5) Micromachanical Sensors
<br>(6) Bio- and Chemical Sensors
<br>(7) Electrostatic Actuation
<br>(8) Mechanics of Material
<br>(9) Mechanical Vibration
<br>(10) Thermomechanical and Electronics Noises in Sensors 
<br>(11) Computer-Aided Design for MEMS
<br>
<br>
<br>六、成績考核(Evaluation)
<br>
<br>Homework + Paper study + Lab (20%)
<br>Final exam (35%)
<br>Project I: accelerometers (25%)
<br>Project II: topic of student's own choice (20%)
<br>Quizzes (extra)
<br>
<br>Students are required to choose a research topic as the final project. In the 
<br>oral presentation and the written report, please clearly address your motivation 
<br>and why the topic is chosen. Students are expected to conduct an extensive 
<br>literature survey and realize the design, analysis, fabrication, performance, 
<br>and important characteristics of related works in the field. 
<br>
<br>報告撰寫： 撰寫報告時可以參考期刊/研討會論文、網路上資料或他人的碩博士論文，請註明出處
<br>即可，以整段或顯著地copy and paste他人文章則是不允許的，必須研讀後以自己的方式寫出自
<br>己的報告。
<br>
<br>
<br> 七、可連結之網頁位址
<br>
<br>eeclass數位學習平台
<br>
<br>
<br>
<br>
<br>