課程大綱 Detailed Course Syllabus
<br>● 課程說明(Silicon Processing Technology for Microelectronics)
<br>11009 微電子工程(ULSI Technology)課程
<br>The advances in ultra-large-scale-integration (ULSI) technology ba<x>sed on 
<br>aggressive scaling of CMOS devices provide enormous opportunities for high-
<br>performance communication, and computing systems. This course is designed to 
<br>provide the current status of advanced ULSI technology  process and CMOS 
<br>integration projecting a road map for nanoelectronic devices for the current and 
<br>next generation. 先修課程: 無
<br>● 指定用書(Text Books)
<br>1.教師自編的微電子工程 (ULSI Technology 500 pages) (Handout of related ULSI 
<br>Nanoelectronic devices SCI journal and conference papers)
<br>2. Hong Xiao(蕭宏) 原著「Introduction to Semiconductor Manufacturing Technology」
<br>(第二版)
<br>● 參考書籍(References)
<br>1. 相關半導體製程與整合之教科書
<br>2. IEEE, IEDM, VLSI, SCI journal papers 
<br>● 教學方式(Teaching Method)
<br>投影片教學 90%, 版書 10%
<br>● 教學進度(Syllabus)
<br>Chapter1: Unit Process Module (半導體單元製程)
<br>Chapter2: ULSI Process Integration (半導體製程整合)
<br>Chapter3: Semiconductor Device Material Analysis (半導體元件材料分析)
<br>Chapter4: ULSI Advanced Process (半導體先進製程)
<br>Chapter5: FinFET Process Integration for N14 (鰭式電晶體製程)
<br>Chapter6: N5/N3/N2/N1 technology research and development (N5到N1製程研究與發展)
<br>● 可連結之網頁位址 相關網頁(Personal Website)
<br>1. https://semiwiki.com/ 2. http://www.imec.org/  3. https://semiengineering.com/   
<br>4. https://www.eetimes.com/
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