11110 NEMS5501高分子微奈米系統技術 (This Course will be offered in English)
<br>
<br>11110 NEMS5501 Polymer Microsystems Technology
<br>W567 @ 台達322教室
<br>Chien-Chung Fu 傅建中
<br>Syllabus
<br>
<br>Week	Date	Syllabus 課程安排
<br>1	2022.09.14	Introduction and Opening the Course
<br>2	2022.09.21	Orientation
<br>3	2022.09.28	教師節 Break
<br>4	2022.10.05	X-Ray Mask and X-Ray Lithography I
<br>5	2022.10.12	X-Ray Mask and X-Ray Lithography II
<br>6	2022.10.19	E-beam RIE and AMANDA
<br>8	2022.10.26	X-Ray Mask and X-Ray Lithography III
<br>9	2022.11.02	Galvanic Deposition
<br>10	2022.11.09	Midterm Exam
<br>11	2022.11.16	運動會
<br>12	2022.11.23	Plastic Molding in the LIGA Process 
<br>Variations and Additional Steps of the LIGA Process 
<br>13	2022.11.30	Mid-Term Report I
<br>14	2022.12.07	Mid-Term Report II
<br>15	2022.12.14	Mid-Term Report III
<br>16	2022.12.21	Company/National Lab Visiting
<br>17	2022.12.28	Break
<br>18	2023.01.04	Final Exam
<br>
<br>Grading: (ba<x>sed on the ranking in the class)
<br>Mid-Term Exam:  25%
<br>Mid-Term Report: 25%
<br>Final Exam: 20%
<br>Weekly reports and class participation: 30%
<br>Textbook: Microsystem Technology, W. Menz, J. Mohr, O. Paul, Wiley-VCH Ch.7~Ch.10
<br>Mid-Term Report/Supplementary Material: 
<br>LIGA and it Applications, Brand etc., Wiley-VCH Ch.8-Ch.19。
<br>Optical Lithography, Here is Why, by Burn Lin, SPIE Ch.3-Ch.8		
<br>