A、課程說明(Course Desc<x>ription)
<br>本課程將以英文授課，主要介紹半導體製程,包括基本原理,製程技術全貌,及實際工業上應用.使研
<br>究所學生在跨入業界或更深入研究前,對半導體製程技術,能一窺全貌,將來能學以致用。
<br>(PS: 本[MS540400半導體製程課程]內容類似原93年之[MS437000半導體製程課程]與 
<br>[MS4141000半導體製程課程],[MS540400半導體製程課程]，本[MS540400半導體製程課程]、
<br>MS437000"及MS4141000經審核皆已通過抵免NDL之「積體電路製程技術訓練班]。)
<br>
<br>This course will be offered in English and will introduce semiconductor 
<br>processing, including materials/devices basics, process technologies, and their 
<br>application in industry. The students can have a thorough overview on 
<br>semiconductor process technologies before going industry or for further indepth 
<br>studies.
<br>
<br>PS: The students who pass this course (MS540400, Semiconductor Processing) can 
<br>be waived to take the NDL's training course of Integrated Circuit Processing 
<br>Technology, which is required by NDL before the usage of NDL facilities. 
<br>
<br>B、指定用書(Text Books)
<br>
<br>1. Introduction to Semiconductor Manufacturing Technology, by Hong 
<br>Xiao, Prentice-Hall,(2001) ISBN 0-13-022404-9
<br>
<br>C、參考書籍(References)
<br>
<br>1. Modern Semiconductor Devices for Integrated Circuits, by Chenming Hu,  2009 
<br>ISBN-10: 0136085253
<br>2. Semiconductor Manufacturing Technology, by Michael Quirk and Julian Serda 
<br>(2001), Prentice Hall Inc.(2001), ISBN 0-13-122937-01. 
<br>3. Semiconductor Devices Physics and Technology, S M Sze, John Wiley and Sons, 
<br>(1985)
<br>4. Silicon VLSI Technology, James D. Plummer, Michael D. Deal, Peter B. 
<br>Griffin, Prentice-Hall Electronics and VLSI Series, Charles Sodini, Series 
<br>Editors, (2000), ISBN 0-13-178458-7
<br>5. The Science and Engineering of Microelectronic Fabrication, Stephen A. 
<br>Campbell, Oxford University Press,(2001), ISBN 0-19-513605-5 
<br>6. Semiconductor Devices, Physics, and Technology, S M Sze, John Wiley & Sons 
<br>(1985)
<br>7. Semiconductor International, Journal
<br>8. Solid State Technology, Journal
<br>
<br>D、教學方式(Teaching Method)
<br>
<br>1. Lecture with projectors
<br>
<br>E、教學進度(Syllabus)
<br>
<br>1. 1 week:  Semiconductor industry introduction
<br>2. 2 weeks: CMOS semiconductor materials/device basics
<br>3. 3 weeks: IC process flow overview
<br>4. 2 weeks: Photolithography
<br>5. 2 weeks: Etch
<br>6  2 weeks: Diffusion
<br>7. 2 weeks: Thin films
<br>8. 1 week: Future technology challenges and trends
<br>
<br>F、成績考核(Evaluation)
<br>
<br>1. Mid-term exam (30%)
<br>2. Homework (30%)
<br>3. Final exam (30%)
<br>4. Interaction at class and small quiz before class (10%)
<br>
<br>G. 教師及助教 (Teaching Assistants) 
<br>1. 教師: 游萃蓉 (Tri-Rung Yew), X42573, 0936347230, 台達館　(Delta building):  
<br>R412,  tryew@mx.nthu.edu.tw，
<br>2. 助教: 材料科技館 (Material Technology Building):　
<br>  　     劉彥廷 nthumse0115@gmail.com, 03-5715131, ext 33824, R227
<br>         羅韶奇 Shaochilo@gmial.com,  03-5715131, ext 33863, R428
<br>         李奕涵 yihan425@gmail.com,  03-5715131 ext 33890, R311 
<br>         蘇偉峻 s0227u@gmail.com, 03-5715131 ext 33890, R311
<br>         劉韋呈 wilsonliutw@gmail.com, 03-5715131 ext 33890, R311
<br>             
<br>H、可連結之網頁位址 (NTHU e-learning)
<br>
<br>Upload handouts and communicate with students.
<br>