一、課程說明(Course Desc<x>ription)
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<br>MEMS (Microelectromechanical systems) technology allows for the miniaturization 
<br>of bio-electro-mechanical devices and systems, enabling the integration of 
<br>various components onto a single chip. This results in numerous benefits, 
<br>including increased functionality, reduced size and cost, improved performance, 
<br>and higher reliability. MEMS technology finds applications in a wide range of 
<br>industries, including automotive, aerospace, biomedical, consumer electronics, 
<br>telecommunications, and more.
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<br>To enhance interdisciplinary learning in this field, this course will cover a 
<br>wide range of topics, including microfabrication, micromechanical and 
<br>biochemical sensors, actuation mechanisms, static and dynamic mechanical 
<br>analysis, noise analysis, sensor readout design, MEMS control, and MEMS system-
<br>level design methodology. 
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<br>二、指定用書(Text Books)
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<br>None. 
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<br>三、參考書籍(References)
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<br>1. Gregory T.A. Kovacs, Micromachined transducers sourcebook, The McGraw-Hill, 
<br>Inc., 1998.
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<br>2. Stephen D. Senturia, Microsystem design, Kluwer Academic Publishers, 2001.
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<br>四、教學方式(Teaching Method)
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<br>Powerpoint presentation and blackboard
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<br>五、教學進度(Syllabus)
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<br>(1) Introduction
<br>(2) Microfabrication
<br>(3) Integrated Processes
<br>(4) Sensing circuits
<br>(5) Micromachanical Sensors
<br>(6) Bio- and Chemical Sensors
<br>(7) Electrostatic Actuation
<br>(8) Mechanics of Material
<br>(9) Mechanical Vibration
<br>(10) Thermomechanical and Electronics Noises in Sensors 
<br>(11) Computer-Aided Design for MEMS
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<br>六、成績考核(Evaluation)
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<br>Homework + Paper study + Lab (20%)
<br>Final exam (30%)
<br>Project I: accelerometers (25%)
<br>Project II: topic of student's own choice (25%)
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<br>Students are required to choose a research topic as the final project. In the 
<br>oral presentation and the written report, please clearly address your motivation 
<br>and why the topic is chosen. Students are expected to conduct an extensive 
<br>literature survey and realize the design, analysis, fabrication, performance, 
<br>and important characteristics of related works in the field. 
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<br>報告撰寫： 報告撰寫需以參考期刊為主，以整段或顯著地copy and paste他人文章則是不允許的，
<br>必須研讀內容後以自己的方式寫出自己的報告。
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<br> 七、可連結之網頁位址
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<br>eeclass數位學習平台
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