Background courses:
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<br>Introduction to MEMS (MicroElectroMechanical Systems)
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<br>Semiconductor Device Physics, IC Design or Fabrication 
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<br>Engineering Mechanics, Mechanics of Materials, Fluid Mechanics
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<br>Grade: Homework: 30%, Midterm: 30%, Final exam.: 20%, Final presentation: 20%
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<br>TAs: TBA
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<br>Tentative Outline for Micro System Design:
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<br>1. Scope of the Micro System Design, the current status of Micro System Technology  
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<br>2. Brief Review of MEMS technology I - Scaling law (hw#1)
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<br>3. Brief Review of MEMS technology III- lithography and IC process 
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<br>4. Brief Review of MEMS technology II- Bulk micromachining (hw#2) 
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<br>5. Brief Review of MEMS technology IV- Surface micromachining, and others. 
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<br>6. Introduction and hand-on practice of MEMS design software-LEIDT (hw#3) ( final project team 
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<br>formation)
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<br>7. Midterm#1
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<br>8. IC and MEMS foundry I.-MOSIS 
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<br>9. Coventerware (11/13, Monday, 高速電腦中心, High Speed Computer Center)
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<br>10.Design example I: IC process and Micro accelerometer design using MOSIS process 
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<br>(hw#4) 
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<br>11. Midterm #2 
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<br>12. IC and MEMS foundry II.- Cronos 
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<br>13. Design example II: Micro comb-drive motor design using MUMPS process (hw#5)
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<br>14. Thermal actuator design 
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<br>15. Final Exam.
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<br>16. Final presentation
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<br>Textbooks:
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<br>1.	Micro System Design Class Notes, Fan-Gang Tseng, NTHU book store, or  
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<br>http://oz.nthu.edu.tw/~d9511818/, 2016
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<br>2.	CMOS Layout Design-Using L-EDIT, Uyemura, 楊忠煌譯, 高立出版社, 1998.
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<br>3.	Microsystem Design, Stephen D. Senturia, Kluwer Academic Publishers, Boston, 
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<br>2000.
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<br>References:
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<br>Semiconductor Sensors, S.M. Sze, Wiley Inter. Science, 1994
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<br>Micromachines, a new era in mechanical engineering, Iwao Fujimasa, Oxford Science 
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<br>Publication, 1996.
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<br>Micro Mechanics and MEMS, classic and seminar papers to 1990, William S. Trimmer, 
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<br>IEEE press, 1997.
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<br>On Size and Life, T. A. McMahon and J. T. Bonner, Scientific American Library, 1983.
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<br>Fundamentals of Microfabrication, Marc Madou, CRC Press, 1997. 
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<br>Micromachined Transducers source book, Gregory T.A. Kovacs, McGraw Hill, 1998 
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