各位的同學,
<br>這個學期的課程將以實體上課, 上課的教室將在台達館321教室。
<br>但仍會保留部分遠距教學的可能性 (視國內疫情 與疫情指揮中心的規定)。
<br>以下是本次課程暫訂的Syllabus，課程內容會依同學實際的學習狀況，略做彈性的調整。 
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<br>本學期會使用line群組和EECLASS, 請確定修課的同學屆時加入群組。
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<br>以下是課綱
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<br>11210 NEMS5501高分子微奈米系統技術
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<br>11210 NEMS5501 Polymer Microsystems Technology
<br>W567 @ 台達321教室
<br>Chien-Chung Fu 傅建中
<br>Syllabus
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<br>Week	Date	Syllabus 課程安排
<br>1	2023.09.13	Introduction and Opening the Course
<br>2	2023.09.20	Orientation
<br>3	2023.09.27	X-Ray Mask and X-Ray Lithography I
<br>4	2023.10.04	X-Ray Mask and X-Ray Lithography II
<br>5	2023.10.11	E-beam RIE and AMANDA
<br>6	2023.10.18	X-Ray Mask and X-Ray Lithography III
<br>8	2023.10.25	Galvanic Deposition
<br>9	2023.11.01	Break
<br>10	2023.11.08	Midterm Exam
<br>11	2023.11.15	運動會
<br>12	2023.11.22	Plastic Molding in the LIGA Process 
<br>Variations and Additional Steps of the LIGA Process 
<br>13	2023.11.29	Mid-Term Report I
<br>14	2023.12.06	Mid-Term Report II
<br>15	2023.12.13	Mid-Term Report III
<br>16	2023.12.20	Company/National Lab Visiting
<br>17	2023.12.27	Break
<br>18	2024.01.03	Final Exam
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<br>Grading: (ba<x>sed on the ranking in the class)
<br>Mid-Term Exam:  25%
<br>Mid-Term Report: 25%
<br>Final Exam: 20%
<br>Weekly reports and class participation: 30%
<br>Textbook: Microsystem Technology, W. Menz, J. Mohr, O. Paul, Wiley-VCH Ch.7~Ch.10
<br>Mid-Term Report/Supplementary Material: 
<br>LIGA and it Applications, Brand etc., Wiley-VCH Ch.8-Ch.19。
<br>Optical Lithography, Here is Why, by Burn Lin, SPIE Ch.3-Ch.8	
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<br>AI原則上可以做為輔助工具。	
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